GAAS: IC Compatible MEMS Technology
Katia Grenier, L. Mazenq, David Dubuc, Fouad Bouchriha, F. Coccetti, Erik Ojefors, Peter Lindberg, Anders Rydberg, J. Berntgen, W.J. Rabe, Ertugrul Sonmez, P. Abele, Hermann Schumacher, Robert Plana
IC compatible MEMS technology
K. Grenier1, L. Mazenq1, D. Dubuc1, F. Bouchriha1, F. Coccetti1, E. Ojefors2, P. Lindberg2, A. Rydberg2, J. Berntgen3, W.J. Rabe3, E. Sonmez4, P.Abele 4, H. Schumacher4, R. Plana1
(1)
LAAS-CNRS, 7. Avenue du Colonel Roche, 31077 Toulouse Cedex 4, France (2) University of Uppsala, P.O. Box 528, 751 20 Uppsala, Sweden (3) Atmel Germany GmbH, Theresienstrae 2, 74072 Hei