EuMIC: Thin Film Wafer Level Encapsulated RF-MEMS Switch for D-Band Applications
S. Tolunay Wipf, A. Goritz, M. Wietstruck, C. Wipf, B. Tillack, Andreas Mai, Mehmet Kaynak
Proceedings of the 11th European Microwave Integrated Circuits Conference
Thin Film Wafer Level Encapsulated RF-MEMS Switch for D-Band Applications
S. Tolunay Wipf1, A. Göritz1, M. Wietstruck1, C. Wipf1, B. Tillack1, 2, A. Mai1, and M. Kaynak1, 3
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IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany Technische Universität Berlin, HFT4, Einsteinufer 25, 10587, Berlin, Germany 3 Sabanci Un